News and Information

Hosted by the Chairs of Microsystems Technology and of Applied Electrodynamics and Plasma Technology at Ruhr University Bochum the workshop (agenda) took place at RUB from February 13 to 14, 2025 in cooperation with Japan Science and Technology Agency (JST)’s ASPIRE project.

Non-thermal plasmas (ionised gases, often referred to as the fourth state of matter) are an important component in the manufacture of microelectronics and microsystems technology, enabling the implementation of Moore’s Law and More than Moore technologies. The workshop served as a lively exchange between plasma physicists, material scientists and microtechnologists, who represent the entire value chain from material to application. offered participants the opportunity to listen to and discuss with many leading experts in the field, among them Prof. Akira Uedono (U Tsukuba), Prof. Erwin Kessels (Eindhoven U of Technology), Prof. Shimogaki (U Tokyo), Prof. Achim von Keudell (RUB), Dr. H. Kino (NIMS) to name just a few of the featured 30 invited speakers. For abstracts of the oral presentations, please have a look in the program book.

The event gathered scientists, process engineers, and industrial partners, discussing cutting-edge research, sharing insights, and fostering collaborations in simulation, diagnostics, single processes, process sequences, but also in the introduction of new technologies into production.